VEAT-005 is a Roots + dry screw pump integrated vacuum system, which adopts the combination of "ZJY Roots pump (main pump) + dry screw pump (foreline pump)", achieving a high pumping speed of 150m³/h (10Pa working condition), dry oil-free cleaning (Class 5 clean room compatible), and closed-loop exhaust gas recovery. It is suitable for processes with strict environmental protection and cleaning requirements such as medicine (vacuum freeze-drying), chemical industry (solvent recovery), and electronics (semiconductor processing), and complies with ISO 21360 (Roots pump) and GB/T 3216 (screw pump) standards.
